Micromachining and Device Transplantation Using Focused Ion Beam.
نویسندگان
چکیده
منابع مشابه
Focused Ion Beam Microscopy and Micromachining
The FIB Instrument The basic functions of the FIB, namely, imaging and sputtering with an ion beam, require a highly focused beam. A consistent tenet of any focused beam is that the smaller the effective source size, the more current that can be focused to a point. Unlike the broad ion beams generated from plasma sources, high-resolution ion beams are defined by the use of a field ionization so...
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ژورنال
عنوان ژورنال: SHINKU
سال: 1991
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.34.861